6 March 2013 An elliptic phase-shift algorithm for high speed three-dimensional profilometry
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A high throughput is often required in many machine vision systems, especially on the assembly line in the semiconductor industry. To develop a non-contact three-dimensional dense surface reconstruction system for real-time surface inspection and metrology applications, in this work, we project sinusoidal patterns onto the inspected objects and propose a high speed phase-shift algorithm. First, we use an illumination-reflectivity-focus (IRF) model to investigate the factors in image formation for phase-measuring profilometry. Second, by visualizing and analyzing the characteristic intensity locus projected onto the intensity space, we build a two-dimensional phase map to store the phase information for each point in the intensity space. Third, we develop an efficient elliptic phase-shift algorithm (E-PSA) for high speed surface profilometry. In this method, instead of calculating the time-consuming inverse trigonometric function, we only need to normalize the measured image intensities and then index the built two-dimensional phase map during real-time phase reconstruction. Finally, experimental results show that it is about two times faster than conventional phase-shift algorithm.
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Fuqin Deng, Fuqin Deng, Zhao Li, Zhao Li, Jia Chen, Jia Chen, Jiangwen Deng, Jiangwen Deng, Kenneth S. M. Fung, Kenneth S. M. Fung, Edmund Y. Lam, Edmund Y. Lam, "An elliptic phase-shift algorithm for high speed three-dimensional profilometry", Proc. SPIE 8661, Image Processing: Machine Vision Applications VI, 86610S (6 March 2013); doi: 10.1117/12.2001417; https://doi.org/10.1117/12.2001417

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