Progress on a short pulse excimer laser system with beam smoothing

Xueqing Zhao; Jingru Liu; Aiping Yi; Yongsheng Zhang; Quanxi Xue; Hengqi Hua; Hang Qian; Yun Hu; Dahui Wang; Ke Huang; Chao Huang; Li Yu; Xi Huang; Yongxiang Zhu; Wei-wei Xiao

doi:10.1117/12.2010556

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30 January 2013 Progress on a short pulse excimer laser system with beam smoothing

Xueqing Zhao; Jingru Liu; Aiping Yi; Yongsheng Zhang; Quanxi Xue; Hengqi Hua; Hang Qian; Yun Hu; Dahui Wang; Ke Huang; Chao Huang; Li Yu; Xi Huang; Yongxiang Zhu; Wei-wei Xiao

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Proceedings Volume 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012; 867717 (2013) https://doi.org/10.1117/12.2010556
Event: XIX International Symposium on High-Power Laser Systems and Applications, 2012, Istanbul, Turkey

Abstract

A short pulse XeCl laser system is being developed for plasma physics and material science study. Partial spatial incoherence seed with short pulse is amplified by MOPA chain including three discharge pumped amplifiers and two electron beam pumped amplifiers for one beam. Final laser output of 5~10J in energy with pulse width of around 10ns has been achieved, which lays a good foundation for full scale construction.

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Xueqing Zhao, Jingru Liu, Aiping Yi, Yongsheng Zhang, Quanxi Xue, Hengqi Hua, Hang Qian, Yun Hu, Dahui Wang, Ke Huang, Chao Huang, Li Yu, Xi Huang, Yongxiang Zhu, and Wei-wei Xiao "Progress on a short pulse excimer laser system with beam smoothing", Proc. SPIE 8677, XIX International Symposium on High-Power Laser Systems and Applications 2012, 867717 (30 January 2013); https://doi.org/10.1117/12.2010556

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