1 April 2013 Evaluation of methods to improve EUV OPC model accuracy
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Abstract
Several methods are evaluated to improve the accuracy of extreme ultraviolet (EUV) lithography OPC models by including additional physical effects which are not commonly used in deep ultraviolet (DUV) OPC. The primary additions to the model in this work are model based corrections for flare and two different corrections for mask shadowing effects, commonly referred to as HV bias. The quantitative, incremental, improvement from each of these additions is reported, and the resulting changes in tape-out flow and OPC runtime are discussed
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Tamer H.. Coskun, Tamer H.. Coskun, Chris Clifford, Chris Clifford, Germain Fenger, Germain Fenger, Gek Soon Chua, Gek Soon Chua, Keith Standiford, Keith Standiford, Ralph Schlief, Ralph Schlief, Craig Higgins, Craig Higgins, Yi Zou, Yi Zou, } "Evaluation of methods to improve EUV OPC model accuracy", Proc. SPIE 8679, Extreme Ultraviolet (EUV) Lithography IV, 86790V (1 April 2013); doi: 10.1117/12.2009281; https://doi.org/10.1117/12.2009281
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