Relationship between stochastic effect and resist pattern defect in extreme ultraviolet lithography

Takahiro Kozawa; Julius Joseph Santillan; Toshiro Itani

doi:10.1117/12.2011240

1 April 2013 Relationship between stochastic effect and resist pattern defect in extreme ultraviolet lithography

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani

Proceedings Volume 8679, Extreme Ultraviolet (EUV) Lithography IV; 867913 (2013) https://doi.org/10.1117/12.2011240
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

With the approach of extreme ultraviolet (EUV) lithography to its realization, practical issues such as the defects of resist patterns have attracted attention. In this study, the defects of line-and-space resist patterns were investigated from the viewpoint of the stochastic effects of chemical reactions. The stochastic effect was expressed using the standard deviation σ of protected unit concentration. To eliminate bridges within ~7 μm length in the line direction, roughly 1-2σ difference is required between average protected unit concentration and dissolution point at the center of space. To eliminate line breaks and severe shrinkages within ~7 μm length in the line direction, roughly 1σ difference is required between average protected unit concentration and dissolution point at the center of resist line pattern.

Citation Download Citation

Takahiro Kozawa, Julius Joseph Santillan, and Toshiro Itani "Relationship between stochastic effect and resist pattern defect in extreme ultraviolet lithography", Proc. SPIE 8679, Extreme Ultraviolet (EUV) Lithography IV, 867913 (1 April 2013); https://doi.org/10.1117/12.2011240

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available