Author Affiliations +
Philippe Foubert,1 Koichi Matsunaga,1,2 Hideo Shite,2 Takeshi Shimoaoki,2 Kathleen Nafus,1,2 Anne-Marie Goethals,1 Dieter Van Den Heuvel,1 Jan Hermans,1 Eric Hendrickx,1 Hitoshi Kosugi2
1IMEC (Belgium)
2Tokyo Electron Kyushu Ltd. (Japan)