Data delivery system for MAPPER using image compression

Jeehong Yang; Serap A. Savari

doi:10.1117/12.2011298

26 March 2013 Data delivery system for MAPPER using image compression

Jeehong Yang, Serap A. Savari

Proceedings Volume 8680, Alternative Lithographic Technologies V; 86800Q (2013) https://doi.org/10.1117/12.2011298
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

The data delivery throughput of electron beam lithography systems can be improved by applying lossless image compression to the layout image and using an electron beam writer that can decode the compressed image on-the-fly. In earlier research we introduced the lossless layout image compression algorithm Corner2, which assumes a somewhat idealized writing strategy, namely row-by-row with a raster order. The MAPPER system has electron beam writers positioned in a lattice formation and each electron beam writer writes a designated block in a zig-zag order. We introduce Corner2-MEB, which redesigns Corner2 for MAPPER systems.

Citation Download Citation

Jeehong Yang and Serap A. Savari "Data delivery system for MAPPER using image compression", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86800Q (26 March 2013); https://doi.org/10.1117/12.2011298

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