Exploration of the directed self-assembly based nano-fabrication design space using computational simulations

Azat Latypov; Moshe Preil; Gerard Schmid; Ji Xu; He Yi; Kenji Yoshimoto; Yi Zou

doi:10.1117/12.2011238

26 March 2013 Exploration of the directed self-assembly based nano-fabrication design space using computational simulations

Azat Latypov, Moshe Preil, Gerard Schmid, Ji Xu, He Yi, Kenji Yoshimoto, Yi Zou

Author Affiliations +

Proceedings Volume 8680, Alternative Lithographic Technologies V; 868013 (2013) https://doi.org/10.1117/12.2011238
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Properly designed geometries of directing pre-patterns broaden the set of lattice symmetries and the local arrangements of patterns achievable by directed self-assembly (DSA) of block copolymers (BCP), compared to the ones achievable in un-directed, bulk systems. We present the results of parametric computational simulation studies, concentrating on exploring the chemoepitaxy or graphoepitaxy directing geometries yielding the DSA structures needed for typical integrated circuits, but not achievable in bulk, undirected annealing of BCP. The examples include the parametric studies of chemoepitaxy and graphoepitaxy DSA patterns etch-transferrable, respectively, into isolated lines and contact hole arrays. The results of the DSA defect simulations are also presented and discussed.

Citation Download Citation

Azat Latypov, Moshe Preil, Gerard Schmid, Ji Xu, He Yi, Kenji Yoshimoto, and Yi Zou "Exploration of the directed self-assembly based nano-fabrication design space using computational simulations", Proc. SPIE 8680, Alternative Lithographic Technologies V, 868013 (26 March 2013); https://doi.org/10.1117/12.2011238

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available