26 March 2013 Perpendicular orientation of block-co-polymer on controlled neutralization layer
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Abstract
We have prepared and analyzed neutralization layer material to perform perpendicular morphology of Poly (styrene-block-methyl methacrylate) (PS-b-PMMA) as Block-Co-Polymers (BCPs). Neutralization layer surface property is optimized by changing hydrophilicity. We have evaluated two types of neutralization layer material. First one is graft type polymer which makes chemical bonding to substrate. The other is crosslink type polymer which becomes insoluble to organic solvent by thermal crosslink reaction. We checked neutralization function by changing film thickness of the neutralization layer under PS-b-PMMA. Regarding to graft type, it was found that when the film thickness of neutralization layer is over 2.3 nm, PS-b-PMMA forms perpendicular morphology on appropriate neutralization layer. Similarly, regarding to crosslink type, it was found that when the film thickness of neutralization layer is over 1.9 nm, PS-b-PMMA forms perpendicular morphology on appropriate neutralization layer. Finally, we will show lamella and cylinder patterns changing L0 of PS-b-PMMA on neutralization layer.
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Daiju Shiono, Daiju Shiono, Tsuyoshi Kurosawa, Tsuyoshi Kurosawa, Kenichiro Miyashita, Kenichiro Miyashita, Tasuku Matsumiya, Tasuku Matsumiya, Ken Miyagi, Ken Miyagi, Katsumi Ohmori, Katsumi Ohmori, } "Perpendicular orientation of block-co-polymer on controlled neutralization layer ", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86801Q (26 March 2013); doi: 10.1117/12.2011638; https://doi.org/10.1117/12.2011638
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