A process for low cost wire grid polarizers

M. P. C. Watts; M. Little; E. Egan; A. Hochbaum; C. Johns; S. Stephansen

doi:10.1117/12.2008924

26 March 2013 A process for low cost wire grid polarizers

M. P. C. Watts, M. Little, E. Egan, A. Hochbaum, C. Johns, S. Stephansen

Proceedings Volume 8680, Alternative Lithographic Technologies V; 86802C (2013) https://doi.org/10.1117/12.2008924
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Oblique angle metal deposition has been combined with high aspect ratio imprinted structures to create wire grid polarizers (WGP’s) for use as polarization recyclers in liquid crystal displays. The process of oblique deposition was simulated to determine optimal feature profile and deposition geometry. The optical results for the oblique deposition WGP show contrast comparable to a conventionally etched WGP. The next steps to the fabrication of meter sized WGP are proposed.

Citation Download Citation

M. P. C. Watts, M. Little, E. Egan, A. Hochbaum, C. Johns, and S. Stephansen "A process for low cost wire grid polarizers", Proc. SPIE 8680, Alternative Lithographic Technologies V, 86802C (26 March 2013); https://doi.org/10.1117/12.2008924

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