10 April 2013 Enhancing scatterometry CD signal-to-noise ratio for 1x logic and memory challenges
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Abstract
The ongoing transition from 2D to 3D structures in logic and memory has led to an increased adoption of scatterometry CD (SCD) for inline metrology. However, shrinking device dimensions in logic and high aspect ratios in memory represent primary challenges for SCD and require a significant breakthrough in improving signal-to-noise performance. We present a report on the new generation of SCD technology, enabled by a new laser-driven plasma source. The developed light source provides several key advantages over conventional arc lamps typically used in SCD applications. The plasma color temperature of the laser driven source is considerably higher than available with arc lamps resulting in >5X increase in radiance in the visible and >10X increase in radiance in the DUV when compared to sources on previous generation SCD tools while maintaining or improving source intensity noise. This high radiance across such a broad spectrum allows for the use of a single light source from 190-1700nm. When combined with other optical design changes, the higher source radiance enables reduction of measurement box size of our spectroscopic ellipsometer from 45×45um box to 25×25um box without compromising signal to noise ratio. The benefits for 1×nm SCD metrology of the additional photons across the DUV to IR spectrum have been found to be greater than the increase in source signal to noise ratio would suggest. Better light penetration in Si and poly-Si has resulted in improved sensitivity and correlation breaking for critical parameters in 1xnm FinFET and HAR flash memory structures.
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Derrick Shaughnessy, Derrick Shaughnessy, Shankar Krishnan, Shankar Krishnan, Lanhua Wei, Lanhua Wei, Andrei V. Shchegrov, Andrei V. Shchegrov, } "Enhancing scatterometry CD signal-to-noise ratio for 1x logic and memory challenges", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 86810V (10 April 2013); doi: 10.1117/12.2021386; https://doi.org/10.1117/12.2021386
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