10 April 2013 Fast simulation method for parameter reconstruction in optical metrology
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Abstract
A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.
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Sven Burger, Sven Burger, Lin Zschiedrich, Lin Zschiedrich, Jan Pomplun, Jan Pomplun, Frank Schmidt, Frank Schmidt, Bernd Bodermann, Bernd Bodermann, } "Fast simulation method for parameter reconstruction in optical metrology", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 868119 (10 April 2013); doi: 10.1117/12.2011154; https://doi.org/10.1117/12.2011154
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