10 April 2013 Fast simulation method for parameter reconstruction in optical metrology
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A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.
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Sven Burger, Sven Burger, Lin Zschiedrich, Lin Zschiedrich, Jan Pomplun, Jan Pomplun, Frank Schmidt, Frank Schmidt, Bernd Bodermann, Bernd Bodermann, "Fast simulation method for parameter reconstruction in optical metrology", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 868119 (10 April 2013); doi: 10.1117/12.2011154; https://doi.org/10.1117/12.2011154

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