You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
10 April 2013Phase extraction from random phase-shifted shadow moiré fringe patterns using stereovision technique
The measurement accuracy of phase shifting shadow moiré is limited by the spatially non-uniform and random phase shift error. Substantial work has been developed to overcome this difficulty. But few works are proposed to deal with the two error sources above simultaneously. In the presented paper, we describe a solution that can compensate the both error sources at the same time. In our proposed method, a binocular stereovision system is integrated into our test configuration. By measuring the coordinates of marks attached to the measurement grating, the stereovision system obtains the position and the setting parameters are calibrated. Then, the acquiring three fringe patterns are analyzed by iterative least squares method in temporal and the phase shift is calibrated by the least squares fitting in spatial. Because a local cost function is used, the proposed calibration technique is insensitive to spatial variations in detector response. Numerical simulations and optical experiments show that the proposed method can effectively minimize the two phase-shift error sources and possess a superior performance than the existing typical phase shifting algorithm.
Feifei Gu,Hubing Du,Hong Zhao, andBing Li
"Phase extraction from random phase-shifted shadow moiré fringe patterns using stereovision technique", Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 868129 (10 April 2013); https://doi.org/10.1117/12.2007707
The alert did not successfully save. Please try again later.
Feifei Gu, Hubing Du, Hong Zhao, Bing Li, "Phase extraction from random phase-shifted shadow moiré fringe patterns using stereovision technique," Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII, 868129 (10 April 2013); https://doi.org/10.1117/12.2007707