19 April 2013 Front Matter: Volume 8682
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8862, including the Title Page, Copyright information, Table of Contents, Introduction (if any), and Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 8682", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 868201 (19 April 2013); doi: 10.1117/12.2028913; https://doi.org/10.1117/12.2028913
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