29 March 2013 EUV lithography using water-developable resist material derived from biomass
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Abstract
A water-developable resist material which had specific desired properties such as high sensitivity of 5.0 μC/cm2, thermal stability of 160 °C, suitable calculated linear absorption coefficients of 13.5 nm, and acceptable CF4 etch selectivity was proposed using EB lithography for EUV lithography. A water developable resist material derived from biomass is expected for non-petroleum resources, environmental affair, safety, easiness of handling, and health of the working people, instead of the common developable process of trimethylphenylammonium hydroxide. 100 nm line and 400 nm space patterning images with exposure dose of 5.0 μC/cm2 were provided by specific process conditions of EB lithography. The developed trehalose derivatives with hydroxyl groups and EB sensitive groups in the water-developable resist material derived from biomass were applicable to future development of high-sensitive and resolution negative type of water-developable resist material as a novel chemical design.
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Satoshi Takei, Satoshi Takei, Akihiro Oshima, Akihiro Oshima, Tomoko G. Oyama, Tomoko G. Oyama, Takumi Ichikawa, Takumi Ichikawa, Atsushi Sekiguchi, Atsushi Sekiguchi, Miki Kashiwakura, Miki Kashiwakura, Takahiro Kozawa, Takahiro Kozawa, Seiichi Tagawa, Seiichi Tagawa, } "EUV lithography using water-developable resist material derived from biomass", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86821T (29 March 2013); doi: 10.1117/12.2010643; https://doi.org/10.1117/12.2010643
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