29 March 2013 Effects of dispense equipment sequence on process start-up defects
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Abstract
Photofluid dispense systems within coater/developer tools have been designed with the intent to minimize cost of ownership to the end user. Waste and defect minimization, dispense quality and repeatability, and ease of use are all desired characteristics. One notable change within commercially available systems is the sequence in which process fluid encounters dispense pump and filtration elements. Traditionally, systems adopted a pump-first sequence, where fluid is “pushed through” a point-of-use filter just prior to dispensing on the wafer. Recently, systems configured in a pump-last scheme have become available, where fluid is “pulled through” the filter, into the pump, and then is subsequently dispensed. The present work constitutes a comparative evaluation of the two equipment sequences with regard to the aforementioned characteristics that impact cost of ownership. Additionally, removal rating and surface chemistry (i.e., hydrophilicity) of the point-of-use filter are varied in order to evaluate their influence on system start-up and defects.
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Nick Brakensiek, Nick Brakensiek, Michael Sevegney, Michael Sevegney, } "Effects of dispense equipment sequence on process start-up defects", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86822A (29 March 2013); doi: 10.1117/12.2011671; https://doi.org/10.1117/12.2011671
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