Spin-on-carbon hardmask based on fullerene derivatives for high-aspect ratio etching

A. Frommhold; R. E. Palmer; A. P. G. Robinson

doi:10.1117/12.2011465

29 March 2013 Spin-on-carbon hardmask based on fullerene derivatives for high-aspect ratio etching

A. Frommhold, R. E. Palmer, A. P. G. Robinson

Proceedings Volume 8685, Advanced Etch Technology for Nanopatterning II; 86850Q (2013) https://doi.org/10.1117/12.2011465
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

The advance of lithographic resolution has made it necessary to adopt extremely thin photoresist films for the fabrication of ‘2x nm’ structures in order to mitigate problems such as resist collapse during development but limiting achievable etch depths at the same time. By using multilayer hardmask stacks a considerable increase in achievable aspect ratio is possible. We have previously presented a fullerene based spin-on carbon hardmask material capable of high aspect ratio etching. Here we report our latest findings in material characterization of one of the original, and one new, formulations. By using a higher adduct derivative fullerene the solubility in industry-friendly solvents and thermal stability could be improved. The etching performance and materials characteristics of the new higher adduct fullerene hardmask were found to be comparable to the original hardmask.

Citation Download Citation

A. Frommhold, R. E. Palmer, and A. P. G. Robinson "Spin-on-carbon hardmask based on fullerene derivatives for high-aspect ratio etching", Proc. SPIE 8685, Advanced Etch Technology for Nanopatterning II, 86850Q (29 March 2013); https://doi.org/10.1117/12.2011465

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available