Paper
9 April 2013 Development of an active isolation mat based on dielectric elastomer stack actuators for mechanical vibration cancellation
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Abstract
This paper describes the development of an active isolation mat for cancelation of vibrations on sensitive devices with a mass of up to 500 gram. Vertical disturbing vibrations are attenuated actively while horizontal vibrations are damped passively. The dimensions of the investigated mat are 140 × 140 × 20 mm. The mat contains 5 dielectric elastomer stack actuators (DESA). The design and the optimization of active isolation mat are realized by ANSYS FEM software. The best performance shows a DESA with air cushion mounted on its circumference. Within the mounting encased air increases static and reduces dynamic stiffness. Experimental results show that vibrations with amplitudes up to 200 μm can be actively eliminated.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roman Karsten, Klaus Flittner, Henry Haus, and Helmut F. Schlaak "Development of an active isolation mat based on dielectric elastomer stack actuators for mechanical vibration cancellation", Proc. SPIE 8687, Electroactive Polymer Actuators and Devices (EAPAD) 2013, 86870Y (9 April 2013); https://doi.org/10.1117/12.2009235
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CITATIONS
Cited by 7 scholarly publications.
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KEYWORDS
Actuators

Silicon

Dielectrics

Finite element methods

Active isolation

Electrodes

Ions

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