9 April 2013 Overcoming obstacles to creating complex MEMS platforms: parallels with the semiconductor and computer design industries
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Abstract
Current MEMS technology is perhaps reminiscent of the early semiconductor technology industry and the first computer systems. As technologies mature, a certain pattern of evolution typically ensues. This path, however, is fraught with challenges (e.g. efficient architectural exploration), which act as discontinuities in the advancement of a technology. Overcoming these obstacles requires innovations and, generally, the establishment of infrastructure. This paper proposes one vision for the future of MEMS technology, describing how the techniques employed in circuit and computing system design can be adapted to MEMS platform design to raise the level of abstraction and facilitate the creation of complex architectures.
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Lesley Shannon, Lesley Shannon, } "Overcoming obstacles to creating complex MEMS platforms: parallels with the semiconductor and computer design industries", Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86910I (9 April 2013); doi: 10.1117/12.2009433; https://doi.org/10.1117/12.2009433
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