9 April 2013 Development of magneto-impedance microsensors for the detection of deep-lying defects using eddy current testing
Author Affiliations +
Abstract
The detection of deep-lying small defects using eddy current non-destructive testing (NDT) involves high spatial resolution and AC field measurement capability. For this purpose multilayered Finemet®/Copper/Finemet magneto-impedance microsensors were elaborated by microfabrication process. The films were deposited separately by sputtering using bi-layers lift-off method. A post-annealing step was achieved under magnetic field, which led to induce a transversal anisotropy in the magnetic films. A method based on double amplitude demodulation was proposed for the AC sensitivity characterization. A sensitivity of 2100 V/T/A has been measured and the sensors presented no hysteresis since a DC bias field larger than anisotropy field is applied. In addition, the sensors sensitivity remains constant up to 1 kHz.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tao Peng, Tao Peng, Johan Moulin, Johan Moulin, Yann Le Bihan, Yann Le Bihan, Francisco Alves, Francisco Alves, } "Development of magneto-impedance microsensors for the detection of deep-lying defects using eddy current testing", Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86910O (9 April 2013); doi: 10.1117/12.2009341; https://doi.org/10.1117/12.2009341
PROCEEDINGS
9 PAGES


SHARE
Back to Top