Low frequency/high sensitivity triaxial monolithic sensor

F. Acernese; R. Canonico; R. De Rosa; G. Giordano; R. Romano; F. Barone

doi:10.1117/12.2008630

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19 April 2013 Low frequency/high sensitivity triaxial monolithic sensor

F. Acernese, R. Canonico, R. De Rosa, G. Giordano, R. Romano, F. Barone

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Proceedings Volume 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013; 86923H (2013) https://doi.org/10.1117/12.2008630
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

This paper describes a new mechanical implementation of a triaxial sensor, configurable as seismometer and/or as accelerometer, consisting of three one-dimensional monolithic FP sensors, suitably geometrically positioned. The triaxial sensor is, therefore, compact, light, scalable, tunable instrument (frequency < 100 mHz with large band (10⁻⁷ Hz − 10 Hz), high quality factor (Q < 1500 in air) with good immunity to environmental noises, guaranteed by an integrated laser optical readout. The measured sensitivity curve is in very good agreement with the theoretical ones (10⁻¹²m/√Hz) in the band (0.1 ÷ 10Hz). Typical applications are in the field of earthquake engineering, geophysics, civil engineering and in all applications requiring large band-low frequency performances coupled with high sensitivities.

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F. Acernese, R. Canonico, R. De Rosa, G. Giordano, R. Romano, and F. Barone "Low frequency/high sensitivity triaxial monolithic sensor", Proc. SPIE 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013, 86923H (19 April 2013); https://doi.org/10.1117/12.2008630

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