Several examples of using contact profilometer for optical surface mapping

M. Havelková; H. Hiklová

doi:10.1117/12.2010362

18 December 2012 Several examples of using contact profilometer for optical surface mapping

M. Havelková, H. Hiklová

Proceedings Volume 8697, 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 86972G (2012) https://doi.org/10.1117/12.2010362
Event: 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2012, Ostravice, Czech Republic

Abstract

The number of devices and methods for non-contact solid surface measurement and mapping is growing. Nevertheless contact devices still have value in measuring roughness, waviness and shape measurement. Modern contact devices measure without any negative influence to the surface and are even used for optical and other sensitive surfaces. Some examples are mentioned in the article below.

Citation Download Citation

M. Havelková and H. Hiklová "Several examples of using contact profilometer for optical surface mapping", Proc. SPIE 8697, 18th Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 86972G (18 December 2012); https://doi.org/10.1117/12.2010362

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