3 January 2013 Copper germanium alloys formation by the low temperature atomic hydrogen treatment
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Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 870005 (2013) https://doi.org/10.1117/12.2016882
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation
Abstract
The influence of atomic hydrogen treatment on two-layer thin-film Cu/Ge system deposited on i-GaAs substrate was investigated. It was established that the treatment in an atomic hydrogen flow with density 1015 at./(cm2•s) at a room temperature for 5 min results the solid state interdiffusion of Cu and Ge thin films and polycrystalline CuGe alloy formation with the vertically oriented grains.
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Artyom I. Kazimirov, Artyom I. Kazimirov, Evgeny V. Erofeev, Evgeny V. Erofeev, Valery A. Kagadei, Valery A. Kagadei, } "Copper germanium alloys formation by the low temperature atomic hydrogen treatment", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 870005 (3 January 2013); doi: 10.1117/12.2016882; https://doi.org/10.1117/12.2016882
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