8 January 2013 Mechanisms of image formation in SEM
Author Affiliations +
Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000W (2013) https://doi.org/10.1117/12.2016850
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation
Semi empirical model of image formation is proposed for scanning electron microscope (SEM) working in low and high voltage modes with registration of back scattered (BSE) and slow secondary (SSE) electrons. The model is based on analysis of experiments executed with a test object with trapezoidal profile and with large slope angles scanned in a SEM. The model is designated for application in virtual SEM.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu. V. Larionov, Yu. V. Larionov, Yu. A. Novikov, Yu. A. Novikov, "Mechanisms of image formation in SEM", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000W (8 January 2013); doi: 10.1117/12.2016850; https://doi.org/10.1117/12.2016850


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