Virtual scanning electron microscope

Yu. V. Larionov; Yu. A. Novikov

doi:10.1117/12.2016977

8 January 2013 Virtual scanning electron microscope

Yu. V. Larionov, Yu. A. Novikov

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000X (2013) https://doi.org/10.1117/12.2016977
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual scanning electron microscope (SEM) can be constructed only on the base of simulator. Examples of work of the virtual SEM in a low-voltage mode and in modes of registration of back scattered electrons (BSE) and slow secondary of electrons (SSE) are given.

Citation Download Citation

Yu. V. Larionov and Yu. A. Novikov "Virtual scanning electron microscope", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000X (8 January 2013); https://doi.org/10.1117/12.2016977

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