8 January 2013 Virtual scanning electron microscope
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Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000X (2013) https://doi.org/10.1117/12.2016977
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation
Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual scanning electron microscope (SEM) can be constructed only on the base of simulator. Examples of work of the virtual SEM in a low-voltage mode and in modes of registration of back scattered electrons (BSE) and slow secondary of electrons (SSE) are given.
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Yu. V. Larionov, Yu. V. Larionov, Yu. A. Novikov, Yu. A. Novikov, } "Virtual scanning electron microscope", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000X (8 January 2013); doi: 10.1117/12.2016977; https://doi.org/10.1117/12.2016977

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