8 January 2013 Effective probe for scanning electron microscope
Author Affiliations +
Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000Y (2013) https://doi.org/10.1117/12.2016917
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation
Abstract
Traditional insight of effective probe of scanning electron microscope (SEM) is considered. A contradiction of this insight with experimental results registered at scanning of test objects with the trapezoidal profile and large slope angles by SEM probe is detected. A new insight of effective probe based on analyzes of the experimental results registered by SEM working in a back scattered electron (BSE) mode is proposed.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yu. V. Larionov, Yu. A. Novikov, "Effective probe for scanning electron microscope", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000Y (8 January 2013); doi: 10.1117/12.2016917; https://doi.org/10.1117/12.2016917
PROCEEDINGS
7 PAGES


SHARE
Back to Top