22 January 2013 Direct laser manufacturing of 1D and 2D micro- and submicro-scale periodic structures
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Proceedings Volume 8703, Laser Technology 2012: Applications of Lasers; 87030F (2013) https://doi.org/10.1117/12.2013280
Event: Tenth Symposium on Laser Technology, 2012, Szczecin, Poland
Abstract
The paper presents results of direct micromachining and direct interference lithography using high power laser. The technology allows one step (direct) manufacturing of surface structures in micro- and submicro-scale with well defined long-range arrangement. Construction of the two-channel laser system creates arms of the Mach-Zehnder interferometer, which allows fast and easy change of the interference pattern parameters as well as control of energy density in the interfering laser beams.
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J. Marczak, A. Rycyk, A. Sarzyński, M. Strzelec, J. Kusiński, R. Major, "Direct laser manufacturing of 1D and 2D micro- and submicro-scale periodic structures", Proc. SPIE 8703, Laser Technology 2012: Applications of Lasers, 87030F (22 January 2013); doi: 10.1117/12.2013280; https://doi.org/10.1117/12.2013280
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