22 January 2013 Passive metamaterial structures manufactured in the laser processing
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Proceedings Volume 8703, Laser Technology 2012: Applications of Lasers; 87030L (2013) https://doi.org/10.1117/12.2014602
Event: Tenth Symposium on Laser Technology, 2012, Szczecin, Poland
This paper presents another technique of manufacturing the unit cells of spiral-shaped resonators - SR on the aluminium nitride (AlN) ceramics. In this technique the AlN plane surface is irradiated by the Nd:YAG (1.06 μm). As a result of the supplied energy, the rupture of aluminium and nitrogen bonds occurs. Consequently, on the dielectric surface the conductive aluminium "paths" are formed. Obtaining the low-ohm conductive structures allows deploying this method to manufacture SR structures which can be used in antennas in order to reduce their coupling. An advantage of the demonstrated method is a possibility of selective and direct metallization of the AlN ceramics surface without a mask as it is required in photolithography process, which greatly reduces the implementation time of the projected metamaterials structures.
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Paweł E. Koziol, Paweł E. Koziol, Arkadiusz J. Antonczak, Arkadiusz J. Antonczak, Maciej R. Nowak, Maciej R. Nowak, Przemyslaw A. Gorski, Przemyslaw A. Gorski, Krzysztof M. Abramski, Krzysztof M. Abramski, } "Passive metamaterial structures manufactured in the laser processing", Proc. SPIE 8703, Laser Technology 2012: Applications of Lasers, 87030L (22 January 2013); doi: 10.1117/12.2014602; https://doi.org/10.1117/12.2014602

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