11 June 2013 A plasmonically enhanced pixel structure for uncooled microbolometer detectors
Author Affiliations +
This paper introduces a method of broadband absorption enhancement that can be integrated with the conventional suspended microbolometer process with no significant additional cost. The premise of this study is that electric field can be enhanced throughout the structural layer of the microbolometer, resulting in an increase in the absorption of the infrared radiation in the long wave infrared window. A concentric double C-shaped plasmonic geometry is simulated using the FDTD method, and this geometry is fabricated on suspended pixel arrays. Simulation results and FTIR measurements are in good agreement indicating a broadband absorption enhancement in the 8 µm-12 µm range for LWIR applications. The enhancement is attained using metallic geometries embedded in the structural layer of the suspended microbridge, where the metallic-dielectric interface increases the average absorption of a 35 µm pixel from 67.6% to 80.1%.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ozan Erturk, Ozan Erturk, Enes Battal, Enes Battal, Seniz Esra Kucuk, Seniz Esra Kucuk, Ali Kemal Okyay, Ali Kemal Okyay, Tayfun Akin, Tayfun Akin, "A plasmonically enhanced pixel structure for uncooled microbolometer detectors", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87041E (11 June 2013); doi: 10.1117/12.2019540; https://doi.org/10.1117/12.2019540


Thermoelectric bolometers based on silicon membranes
Proceedings of SPIE (May 29 2017)
In band low power laser dazzle and pixel damage of...
Proceedings of SPIE (October 08 2018)
Recent Advances In Silicide Detectors
Proceedings of SPIE (July 04 1989)
Infrared Stokes imaging polarimeter using microbolometers
Proceedings of SPIE (August 27 2009)
A parametric analysis of microbolometer pixel designs
Proceedings of SPIE (September 16 2011)

Back to Top