11 June 2013 Low-cost compact thermal imaging sensors for body temperature measurement
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Abstract
This paper presents a 32x32 microbolometer thermal imaging sensor for human body temperature measurement. Waferlevel vacuum packaging technology allows us to get a low cost and compact imaging sensor chip. The microbolometer uses V-W-O film as sensing material and ROIC has been designed 0.35-um CMOS process in UMC. A thermal image of a human face and a hand using f/1 lens convinces that it has a potential of human body temperature for commercial use.
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Myung-Soo Han, Myung-Soo Han, Seok Man Han, Seok Man Han, Hyo Jin Kim, Hyo Jin Kim, Jae Chul Shin, Jae Chul Shin, Mi Sook Ahn, Mi Sook Ahn, Hyung Won Kim, Hyung Won Kim, Yong Hee Han, Yong Hee Han, } "Low-cost compact thermal imaging sensors for body temperature measurement", Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87041O (11 June 2013); doi: 10.1117/12.2015662; https://doi.org/10.1117/12.2015662
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