Multilevel DLC (Diamondlike Carbon) Capacitor Structure

J. L. Davidson; C. Ellis; T. Baginski

doi:10.1117/12.943682

6 April 1988 Multilevel DLC (Diamondlike Carbon) Capacitor Structure

J. L. Davidson, C. Ellis, T. Baginski

Proceedings Volume 0871, Space Structures, Power, and Power Conditioning; (1988) https://doi.org/10.1117/12.943682
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

The dielectric properties of DLC films formed by bias plasma enhanced CVD of methane are examined. Capacitors with nickel, copper, aluminum, silicon and carbon film electrodes to the PLC film were formed. Resistivity and dielectric strength were determined, in relation to substrate and plasma energy and bias. PLC films with breakdown over 10 Volts/cm a, d CF (Dissipation Factor) less than .01 were used in capacitor structures. Five layer structures were evaluated.

Citation Download Citation

J. L. Davidson, C. Ellis, and T. Baginski "Multilevel DLC (Diamondlike Carbon) Capacitor Structure", Proc. SPIE 0871, Space Structures, Power, and Power Conditioning, (6 April 1988); https://doi.org/10.1117/12.943682

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