6 April 1988 Multilevel DLC (Diamondlike Carbon) Capacitor Structure
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Proceedings Volume 0871, Space Structures, Power, and Power Conditioning; (1988) https://doi.org/10.1117/12.943682
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States
Abstract
The dielectric properties of DLC films formed by bias plasma enhanced CVD of methane are examined. Capacitors with nickel, copper, aluminum, silicon and carbon film electrodes to the PLC film were formed. Resistivity and dielectric strength were determined, in relation to substrate and plasma energy and bias. PLC films with breakdown over 10 Volts/cm a, d CF (Dissipation Factor) less than .01 were used in capacitor structures. Five layer structures were evaluated.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. L. Davidson, C. Ellis, T. Baginski, "Multilevel DLC (Diamondlike Carbon) Capacitor Structure", Proc. SPIE 0871, Space Structures, Power, and Power Conditioning, (6 April 1988); doi: 10.1117/12.943682; https://doi.org/10.1117/12.943682
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