Antenna-coupled uncooled Nb5N6 microbolometers for terahertz imaging

X. C. Tu; Q. K. Mao; L. Xu; C. Wan; Z. L. Sun; L. Kang; J. Chen; P. H. Wu

doi:10.1117/12.2014414

31 May 2013 Antenna-coupled uncooled Nb₅N₆ microbolometers for terahertz imaging

X. C. Tu, Q. K. Mao, L. Xu, C. Wan, Z. L. Sun, L. Kang, J. Chen, P. H. Wu

Proceedings Volume 8716, Terahertz Physics, Devices, and Systems VII: Advanced Applications in Industry and Defense; 871605 (2013) https://doi.org/10.1117/12.2014414
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

In recent years our team has done a lot of work toward the goal of sensitive, inexpensive detectors for terahertz detection. In this paper we describe simple fabrication steps and the characterizations of uncooled Nb₅N₆ microbolometers for terahertz imaging. The best dc responsivity of the Nb₅N₆ microbolometer is –760 V/W at the bias current of 0.19 mA. A typical noise voltage as low as 10 nV/Hz^1/2 yields a low noise equivalent power (NEP) of 1.3×10^-11 W/Hz^1/2 at a modulation frequency above 4 kHz. We constructed a quasi-optical type receiver by attaching this uncooled Nb₅N₆ microbolometer to the hyperhemispherical silicon lens. Subsequently, the imaging experiment is performed using this Nb₅N₆ microbolometer receiver at a THz imaging system.

Citation Download Citation

X. C. Tu, Q. K. Mao, L. Xu, C. Wan, Z. L. Sun, L. Kang, J. Chen, and P. H. Wu "Antenna-coupled uncooled Nb₅N₆ microbolometers for terahertz imaging", Proc. SPIE 8716, Terahertz Physics, Devices, and Systems VII: Advanced Applications in Industry and Defense, 871605 (31 May 2013); https://doi.org/10.1117/12.2014414

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