Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring

Anton Köck; Elise Brunet; Oliver Freudenberg; Christoph Gamauf; Jochen Kraft; Giorgio C. Mutinati; Thomas Maier; Alexander Nemecek; Franz Schrank; Martin Schrems; Martin Siegele; Jörg Siegert; Stephan Steinhauer; Jordi Teva

doi:10.1117/12.2016526

29 May 2013 Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring

Anton Köck, Elise Brunet, Oliver Freudenberg, Christoph Gamauf, Jochen Kraft, Giorgio C. Mutinati, Thomas Maier, Alexander Nemecek, Franz Schrank, Martin Schrems, Martin Siegele, Jörg Siegert, Stephan Steinhauer, Jordi Teva

Author Affiliations +

Proceedings Volume 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V; 87250L (2013) https://doi.org/10.1117/12.2016526
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

We present performance results of SnO₂ and CuO nanowire gas sensor devices, where single and multi-nanowire device configurations have been employed in order to optimize sensor design. In particular the response to the target gases CO, H₂, and H₂S has been measured in dry and humid air; both the SnO₂ and CuO nanowire sensors are able to detect CO in the low ppm concentration range, which is important for environmental monitoring. The CuO multi-nanowire devices show an extraordinary high response to H₂S with sensitivity in the low ppb concentration. We present our developments of CMOS technology based micro-hotplates, which are employed as platform for gas sensitive thin films and nanowires. Potential heterogeneous integration of nanowires on the micro-hotplate chips as well as an approach towards gas sensor arrays is discussed. We conclude that CMOS integrated multi-nanowire gas sensors are highly promising candidates for the practical realization of multi-parameter sensor devices for indoor and outdoor environmental monitoring.

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Anton Köck, Elise Brunet, Oliver Freudenberg, Christoph Gamauf, Jochen Kraft, Giorgio C. Mutinati, Thomas Maier, Alexander Nemecek, Franz Schrank, Martin Schrems, Martin Siegele, Jörg Siegert, Stephan Steinhauer, and Jordi Teva "Metal oxide nanowire gas sensors for indoor and outdoor environmental monitoring", Proc. SPIE 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V, 87250L (29 May 2013); https://doi.org/10.1117/12.2016526

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