High-actuator-count MEMS deformable mirrors

Michael A. Helmbrecht; Min He; Carl J. Kempf

doi:10.1117/12.2016198

29 May 2013 High-actuator-count MEMS deformable mirrors

Michael A. Helmbrecht, Min He, Carl J. Kempf

Proceedings Volume 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V; 87250V (2013) https://doi.org/10.1117/12.2016198
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

Adaptive optics (AO) technology has enabled dramatic improvement in imaging performance for fields spanning astronomy, defense, microscopy, and retinal imaging. A critical component within the AO systems is the deformable mirror (DM) that implements the actual wavefront correction. This paper introduces the Iris AO segmented MEMS DM technology with an overview of the fabrication process and a description of the DM operation. The paper demonstrates correction capabilities of 111 and 489 actuator DMs and describes recent effort for scaling to 1000-actuator class DMs. Finally, the paper presents laser testing results of dielectric coated DMs and describes the development path for MEMS DMs capable of 2.8 kW/cm² average laser power.

Citation Download Citation

Michael A. Helmbrecht, Min He, and Carl J. Kempf "High-actuator-count MEMS deformable mirrors", Proc. SPIE 8725, Micro- and Nanotechnology Sensors, Systems, and Applications V, 87250V (29 May 2013); https://doi.org/10.1117/12.2016198

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