31 January 2013 High-precision aspherical wavefront shaping with combined computer generated holograms
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Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875929 (2013) https://doi.org/10.1117/12.2014791
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
The problem of design and fabrication of metrological standards of aspherical wavefronts and aspherical surfaces is considered. Method for wavefront shaping by computer-generated hologram (CGH) is presented. The wavefront errors caused by fabrication process of CGH, substrate nonuniformity and misalignment against interferometer are considered and discussed in details. Practical results of design and fabrication of amplitude and phase combined CGHs for shaping of two functionally independent wavefronts are presented. It is experimentally shown that errors of wavefront are localized within 0.01 wavelength. It is shown that hologram of this kind allows to subtract from measurements results substrate non-uniformity and fabrication error.
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A. G. Poleshchuk, A. G. Poleshchuk, R. K. Nasyrov, R. K. Nasyrov, } "High-precision aspherical wavefront shaping with combined computer generated holograms", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875929 (31 January 2013); doi: 10.1117/12.2014791; https://doi.org/10.1117/12.2014791
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