31 January 2013 A contact probe using Michelson interferometers for CMMs
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Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87592E (2013) https://doi.org/10.1117/12.2016788
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
A high precision contact probe for a micro/nano-CMM was developed to detect the 3D motion of the stylus tip. This contact probe is composed of a stylus with a ball tip, a suspension plate and three displacement sensors. The stylus was connected to the suspension plate, which is suspended to the probe housing by three beryllium-copper leaf springs. A 3D translation of a ball tip causing by probing force would be transferred to three Z-displacements on the suspension plate. Displacement sensors, based on the classic model of Michelson interferometer, can measure nanoscale displacement on the plate. Calibrations with a nano measuring and positioning machine (NMM) proved the typical standard deviation was less than 20 nm for both the trigger and scanning modes.
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Chao-min Huang, Bo-Hsun Liao, Kuang-Chao Fan, "A contact probe using Michelson interferometers for CMMs", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87592E (31 January 2013); doi: 10.1117/12.2016788; https://doi.org/10.1117/12.2016788
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