Characteristic evaluation and experimental analysis of the ultrahigh precision three-dimensional scanning probe

Shuai Liu; Zi Xue; Shu-liang Ye; Dexin Hou; He-yan Wang

doi:10.1117/12.2014564

31 January 2013 Characteristic evaluation and experimental analysis of the ultrahigh precision three-dimensional scanning probe

Shuai Liu, Zi Xue, Shu-liang Ye, Dexin Hou, He-yan Wang

Author Affiliations +

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87592M (2013) https://doi.org/10.1117/12.2014564
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Probe is the kernel component of the precision measuring instrument for the system accuracy which is determined by the probe characteristic. Three-dimensional scanning probe is an ideal choice for gear helical error measurement because it has both space coordinates points detecting capacity and scan capacity on the space of curves and surfaces. In order to make full use of the probe’s capacity and improve the measurement accuracy, characteristic evaluation of the probe is necessary before used. The static calibration equipment for the sensor has been established based on the high precision PZT micro displacement platform. Linear characteristic analysis and compensate of the ultra-high precision three-dimensional scanning probe has been done by this equipment, which greatly improved the accuracy of the probe. Finally, probe characteristic under working status is analyzed and experimentally verified which will be very helpful to compensate the probe errors.

Citation Download Citation

Shuai Liu, Zi Xue, Shu-liang Ye, Dexin Hou, and He-yan Wang "Characteristic evaluation and experimental analysis of the ultrahigh precision three-dimensional scanning probe", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87592M (31 January 2013); https://doi.org/10.1117/12.2014564

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