Micro-hole fabrication based on focus-shaped radially polarized beams

Furong Du; Zhehai Zhou; Xiaoqing Zhang; Lianqing Zhu

doi:10.1117/12.2015094

31 January 2013 Micro-hole fabrication based on focus-shaped radially polarized beams

Furong Du, Zhehai Zhou, Xiaoqing Zhang, Lianqing Zhu

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87593J (2013) https://doi.org/10.1117/12.2015094
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

A micro-hole fabrication scheme based on focus-shaped radially polarized beams is presented. First, a micro-hole fabrication system is demonstrated based on the focus shaping of radially polarized beams, where a high energy ultra-small spot with a long depth of focus can be obtained by focus shaping using the combination of a diffractive optical element (DOE) and a high numerical-aperture objective, and such focused spot is preferred to fabricate the micro-hole with a high ratio of depth and radius. Then, diffractive optical elements (DOEs) are designed to achieve such ultra-small spots with a long depth of focus using the global search algorithm, and the focus-shaped field intensities are calculated based on vector diffraction theory. Finally, a conclusion is drawn from the theoretical analysis and numerical simulation, and focus-shaped radially polarized beams are suitable to fabricate the micro-hole with a high ratio of depth and radius.

Citation Download Citation

Furong Du, Zhehai Zhou, Xiaoqing Zhang, and Lianqing Zhu " Micro-hole fabrication based on focus-shaped radially polarized beams", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87593J (31 January 2013); https://doi.org/10.1117/12.2015094

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