31 January 2013 Experimental study on the absolute measurement of spherical surface with high accuracy
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Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87594M (2013) https://doi.org/10.1117/12.2016642
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ~0.6nm.
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Xi Hou, Xi Hou, Weihong Song, Weihong Song, Fan Wu, Fan Wu, Liming Lu, Liming Lu, "Experimental study on the absolute measurement of spherical surface with high accuracy", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594M (31 January 2013); doi: 10.1117/12.2016642; https://doi.org/10.1117/12.2016642
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