Microscopic fringe projection system and measuring method

Jinping Chen; Tong Guo; Longlong Wang; Zhichao Wu; Xing Fu; Xiaotang Hu

doi:10.1117/12.2014756

31 January 2013 Microscopic fringe projection system and measuring method

Jinping Chen, Tong Guo, Longlong Wang, Zhichao Wu, Xing Fu, Xiaotang Hu

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87594U (2013) https://doi.org/10.1117/12.2014756
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Microscopic fringe projection method based on fringe projection and microscopic imaging was proposed to measure the 3D profile of micro-components, which is fast, accurate and non-contact. The measurement system includes two sets of microscope tubes: one for projecting fringe, and the other for imaging. The sinusoidal fringes generated by the software were projected onto the tested object through the DLP projector. The deformed fringes were captured by the CCD camera. The five-step phase shifting method was used for the phase extraction, and the branch cut algorithm was applied for the phase unwrapping process. After system calibration, a coin was measured to show the applicability of the system.

Citation Download Citation

Jinping Chen, Tong Guo, Longlong Wang, Zhichao Wu, Xing Fu, and Xiaotang Hu "Microscopic fringe projection system and measuring method", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594U (31 January 2013); https://doi.org/10.1117/12.2014756

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