31 January 2013 Character measurement and analyzing of micro optical lenses array fabricated by UV-imprint
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Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875951 (2013) https://doi.org/10.1117/12.2015118
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China
Abstract
Micro lens array used in parallel laser direct writing process is fabricated with UV imprinting and dry etching. Experiment results show that the relief of fabrication result is confirmed with that of original stamp. And the optical character test experiments show that the focused spot array under both writing laser and focusing test laser is similar. And the single spot profile under both writing laser and focusing test laser is also similar.
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Nan Liu, Nan Liu, Peng Jin, Peng Jin, Jiubin Tan, Jiubin Tan, } "Character measurement and analyzing of micro optical lenses array fabricated by UV-imprint", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875951 (31 January 2013); doi: 10.1117/12.2015118; https://doi.org/10.1117/12.2015118
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