17 May 2013 Optical position feedback of quasi-static 2D MOEMS mirrors
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Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.
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A. Tortschanoff, A. Tortschanoff, M. Baumgart, M. Baumgart, D. Holzmann, D. Holzmann, M. Lenzhofer, M. Lenzhofer, T. Sandner, T. Sandner, A. Kenda, A. Kenda, "Optical position feedback of quasi-static 2D MOEMS mirrors", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630J (17 May 2013); doi: 10.1117/12.2016852; https://doi.org/10.1117/12.2016852

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