Counting x-ray line detector with monolithically integrated readout circuits

T. Lohse; P. Krüger; H. Heuer; M. Oppermann; H. Torlee; N. Meyendorf

doi:10.1117/12.2017384

17 May 2013 Counting x-ray line detector with monolithically integrated readout circuits

T. Lohse, P. Krüger, H. Heuer, M. Oppermann, H. Torlee, N. Meyendorf

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87632Q (2013) https://doi.org/10.1117/12.2017384
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

The developed direct converting X-ray line detectors offer a number of advantages in comparison to other X-ray sensor concepts. Direct converting X-ray detectors are based on absorption of X-rays in semiconductor material, which leads to a generation of charge carriers. By applying high bias voltage charge carriers can be separated and with this the arising current pulse can be assessed by suitable readout integrated circuits (ICs) subsequently. The X-ray absorber itself is implemented as a diode based on GaAs to use it in the reverse direction. It exhibits low dark currents and can therefore be used at room temperatures. The GaAs absorber has a structured top electrode designed on variable bonding and high breakdown voltages. The implemented GaAs absorber exhibits a pixel size of 100 μm while the readout IC features fast dead-time-free readout, energy discrimination by two individually adjustable thresholds with 20 bit deep counters and radiation-hard design on chip level. These properties guarantee the application as fast and thus sensitive line detector for imaging processes. Another advantage of the imaging line detector is the cascadability of several sensor modules with 1024 pixels each. This property ensures that the 102.4 mm long sensor modules can be concatenated virtually with arbitrary length gaplessly. The readout ICs hitting radiation dose can be further minimized by implementing constructive steps to ensure longer lifetime of the sensor module. Furthermore, first results using the introduced sensor module for solid state X-ray detection are discussed.

Citation Download Citation

T. Lohse, P. Krüger, H. Heuer, M. Oppermann, H. Torlee, and N. Meyendorf "Counting x-ray line detector with monolithically integrated readout circuits", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87632Q (17 May 2013); https://doi.org/10.1117/12.2017384

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

X-rays

X-ray detectors

Gallium arsenide

Photons

Absorption

Electrodes

Show All Keywords

Keywords/Phrases

Search In:

Publication Years