17 May 2013 Fabrication of an array-like freeform molding tool for UV-replication using a step and repeat process
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Abstract
Artificial compound eye cameras are a prominent approach of next generation wafer level cameras for consumer electronics due to their lower z-height compared to conventional single aperture objectives. In order to address low cost and high volume markets, their fabrication is based on a wafer level UV-replication process. The image quality of compound eye cameras can be increased significantly by the use of refractive freeform arrays (RFFA) instead of conventional microlens arrays. Therefore, we present the fabrication of a RFFA wafer level molding tool by a step and repeat process for the first time. The surface qualities of the fabricated structures were characterized with a white light interferometer.
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J. Dunkel, J. Dunkel, F. Wippermann, F. Wippermann, A. Brückner, A. Brückner, A. Reimann, A. Reimann, A. Bräuer, A. Bräuer, } "Fabrication of an array-like freeform molding tool for UV-replication using a step and repeat process", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876330 (17 May 2013); doi: 10.1117/12.2016534; https://doi.org/10.1117/12.2016534
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