17 May 2013 Simulation of thick film PZT actuators with interdigitated electrodes
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Abstract
This paper deals with the simulation of membrane actuators based on thick film piezoelectric ceramics with interdigitated electrodes using the finite element method. A modified piezoelectric coupling matrix is introduced to account for the piezoelectric non-linearity due to poling and actuation at high electric fields. Electrodes were fabricated on top of 250 μm thick PZT substrates which were characterized. The experimental data verified the simulation results and proved the necessity of the modified coupling matrix.
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Mohanad Mohammed Zaki, Mohanad Mohammed Zaki, Sandy Zähringer, Sandy Zähringer, Norbert Schwesinger, Norbert Schwesinger, } "Simulation of thick film PZT actuators with interdigitated electrodes", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876338 (17 May 2013); doi: 10.1117/12.2017411; https://doi.org/10.1117/12.2017411
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