Paper
22 May 2013 Monolithic integration of high-Q wedge resonators with vertically coupled waveguides
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Abstract
Typical UHQ resonators, microspheres and microtoroids, lack the possibility of integration into lightwave circuits due to their planarity constrains. In this context, CMOS-compatible alternatives in the form of wedge resonators have been proposed. However, the mode retraction from the wedge cavity inhibits the possibility to side couple with integrated waveguides and therefore, halts the full integration within a planar lightwave circuit. In this work, we propose and demonstrate experimentally the complete integration of wedge resonators with vertically coupled dielectric bus waveguides. This coupling scheme permits to use arbitrary gaps, geometries and materials, enables simplified and precise control of the light injection into the cavity and opens the door to an industrial mass-fabrication of UHQ resonators.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fernando Ramiro-Manzano, Nikola Prtljaga, Lorenzo Pavesi, Georg Pucker, and Mher Ghulinyan "Monolithic integration of high-Q wedge resonators with vertically coupled waveguides", Proc. SPIE 8767, Integrated Photonics: Materials, Devices, and Applications II, 876704 (22 May 2013); https://doi.org/10.1117/12.2017400
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Cited by 2 scholarly publications.
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KEYWORDS
Resonators

Waveguides

Etching

Reactive ion etching

Plasma enhanced chemical vapor deposition

Scanning electron microscopy

Amorphous silicon

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