Currently, micro-components are required to fabricate with great precision owing to the miniaturization of complex
product. In order to assess the dimension, size, and other geometric quantities of such complex micro-components,
technological progress is needed in micro- and nano-coordinate metrology. Therefore, the coordinate metrology have
been attempted thus far. To establish nano-coordinate metrology with a microprobe technique, we have been developing
the optically trapped probe, whose principle is based on the single-beam gradient-force optical trap of a particle in air.
However, the rapidly increasing complexity including micro-fine figures makes it difficult to evaluate geometric
quantities using a microprobe that can barely access a concave surface. An improved microprobe is required to have a
better long working distance, wide measurement range, and high resolution. In this paper, a novel probing technique for
coordinate metrology is discussed. The proposed method is based on optical interference, which is seen as a standing
wave pattern, also called a standing wave scale. The feasibility is examined by the profile measurement of a smooth
surface with high accuracy and the dimensional measurement of a trench structure.