Gated imaging for multi-layer wave-front sensing and surface reconstruction

ChingSeong Tan; Xin Wang; Wee Keong Lim; Yong Han Ng; Tong Yuen Chai

doi:10.1117/12.2020845

22 June 2013 Gated imaging for multi-layer wave-front sensing and surface reconstruction

ChingSeong Tan, Xin Wang, Wee Keong Lim, Yong Han Ng, Tong Yuen Chai

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87690B (2013) https://doi.org/10.1117/12.2020845
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.

Citation Download Citation

ChingSeong Tan, Xin Wang, Wee Keong Lim, Yong Han Ng, and Tong Yuen Chai "Gated imaging for multi-layer wave-front sensing and surface reconstruction", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690B (22 June 2013); https://doi.org/10.1117/12.2020845

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